ACLS · Axcelis Technologies, Inc.

Summary

Axcelis Technologies, Inc. announced financial results for Q4 and full year 2025, reporting Q4 revenue of $238 million, GAAP diluted EPS of $1.10, and non-GAAP diluted EPS of $1.49. The company provided Q1 2026 guidance of approximately $195 million revenue and non-GAAP EPS of $0.71, and referenced a pending merger with Veeco.

Key takeaways

• Q4 2025 revenue $238,330 thousand vs $252,417 thousand in Q4 2024
• Q4 2025 GAAP gross margin 47.0% vs 46.0% in Q4 2024
• Q4 2025 GAAP diluted EPS $1.10 vs $1.54 in Q4 2024
• Full year 2025 revenue $839,048 thousand vs $1,017,865 thousand in 2024
• Q1 2026 guidance: revenue ~$195 million, GAAP EPS ~$0.38, non-GAAP EPS ~$0.71
• Pending merger with Veeco announced October 1, 2025
• Generated more than $100 million free cash flow in 2025
• Returned more than $120 million capital to shareholders in 2025